Comparison study of algorithms and accuracy in the wavelength scanning interferometry
نویسندگان
چکیده
منابع مشابه
Comparison study of algorithms and accuracy in the wavelength scanning interferometry.
Wavelength scanning interferometry (WSI) can be used for surface measurement with discontinuous surface profiles by producing phase shifts without any mechanical scanning process. The choice of algorithms for the WSI to analyze the fringe pattern depends on the desired accuracy and computing speed. This paper provides comparison of four different algorithms to analyze the interference fringe pa...
متن کاملQuadrature wavelength scanning interferometry.
A novel method to double the measurement range of wavelength scanning interferometery (WSI) is described. In WSI the measured optical path difference (OPD) is affected by a sign ambiguity, that is, from an interference signal it is not possible to distinguish whether the OPD is positive or negative. The sign ambiguity can be resolved by measuring an interference signal in quadrature. A method t...
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چکیده ندارد.
15 صفحه اولAcceleration Computing Process in Wavelength Scanning Interferometry
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ژورنال
عنوان ژورنال: Applied Optics
سال: 2012
ISSN: 1559-128X,2155-3165
DOI: 10.1364/ao.51.008854